Concepedia

Concept

optical metrology

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8.6K

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368K

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25K

Authors

3.2K

Institutions

Absolute Phase Metrology

1964 - 1970

The 1964–1970 interval centered on absolute phase sensing and path-length control as the core drivers of precision optical metrology, with interferometric methods, wavefront analysis, and material constant measurements becoming standard practice. The advent of folded optical delay lines and holographic wavefront reconstruction expanded capabilities for long-path metrology, nondestructive testing, and optical buffering in high-precision contexts. Across the era, systematic calibration and reproducible measurement of optical constants underpinned both coatings characterization and infrared metrology applications.

Interferometry and Ellipsometry Metrology

1971 - 1983

Coherence-Domain Interferometry

1984 - 1990

Ultrafast Optical Metrology

1991 - 2002

Distributed High-Resolution Metrology

2003 - 2009

Ultra-Precision Optical Metrology

2010 - 2016

Chip-Scale Photonic Metrology

2017 - 2023